- Patent Title: Semiconductor memory structure and method of manufacturing the same
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Application No.: US17141915Application Date: 2021-01-05
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Publication No.: US11683936B2Publication Date: 2023-06-20
- Inventor: Meng-Han Lin , Chia-En Huang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT Law
- Agent Anthony King
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/11587 ; H10B51/20 ; H10B51/10

Abstract:
A semiconductor memory structure and method of manufacturing a semiconductor memory structure are provided. The semiconductor memory structure includes alternatively arranged stacking portions and cell regions. Each cell region includes two ferroelectric layers formed along the adjacent stacking portions; and at least one central portion disposed between the ferroelectric layers and including a first conductive structure and a second conductive structure separated by a channel isolation structure as well as two semiconductor layers formed along the ferroelectric layers. The first conductive structure includes a contact portion and an extension portion. The contact portion is disposed between the semiconductor layers. The extension portion extends from the contact portion to the channel isolation structure and is separated from the semiconductor layers through dielectric layers.
Public/Granted literature
- US20220216235A1 SEMICONDUCTOR MEMORY STRUCTURE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2022-07-07
Information query
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