Invention Grant
- Patent Title: Multi-toothed, magnetically controlled retaining ring
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Application No.: US17360138Application Date: 2021-06-28
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Publication No.: US11691244B2Publication Date: 2023-07-04
- Inventor: Boguslaw A. Swedek
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: B24B37/32
- IPC: B24B37/32 ; B24B49/04 ; B24B37/013

Abstract:
A system and method for polishing a substrate, and a retaining ring assembly therefor, are described herein. A retaining ring assembly is configured to be attached to a carrier head. The retaining ring assembly includes a retaining ring including a lower surface, an inner surface, an outer surface and a plurality of grooves, where the lower surface is configured to contact a polishing pad during a polishing process, and each of the plurality of grooves are formed in the lower surface and extend from the inner surface to the outer surface. The retaining ring assembly includes a plurality of retainers, each retainer including a movable tooth at least partially disposed in a respective groove of the retaining ring and moveable relative to the lower surface.
Public/Granted literature
- US20220009053A1 MULTI-TOOTHED, MAGNETICALLY CONTROLLED RETAINING RING Public/Granted day:2022-01-13
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