Invention Grant
- Patent Title: Metal-oxide semiconductor evaporation source equipped with variable temperature control module
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Application No.: US17105743Application Date: 2020-11-27
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Publication No.: US11692260B2Publication Date: 2023-07-04
- Inventor: Bum Ho Choi , Seung Soo Lee , Yeong Geun Jo , Yong Sik Kim
- Applicant: T.O.S CO., Ltd.
- Applicant Address: KR Osan-si
- Assignee: T.O.S. CO., LTD.
- Current Assignee: T.O.S. CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Finch & Maloney PLLC
- Priority: KR 20200030215 2020.03.11
- Main IPC: C23C14/08
- IPC: C23C14/08 ; B01L3/04 ; C23C14/54 ; C23C14/24 ; C23C14/30 ; B01L7/00

Abstract:
A metal-oxide electron-beam evaporation source including a variable temperature control device according to the present invention includes: a crucible configured to store a deposition material which is formed of a metal oxide and over which an electron beam is directly scanned; N heating units provided in an outer portion of the crucible, dividing the crucible into N regions, and provided for N regions, respectively; and a control unit configured to control the N heating units so that a temperature of an upper region of the crucible is maintained to be higher than that of a lower region of the crucible to reduce a temperature difference between a region over which the electron beam is scanned and a region over which the electron beam is not scanned.
Public/Granted literature
- US20210285088A1 METAL-OXIDE SEMICONDUCTOR EVAPORATION SOURCE EQUIPPED WITH VARIABLE TEMPERATURE CONTROL MODULE Public/Granted day:2021-09-16
Information query
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