Invention Grant
- Patent Title: Coating control using forward parameter correction and adapted reverse engineering
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Application No.: US16619840Application Date: 2018-09-28
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Publication No.: US11692263B2Publication Date: 2023-07-04
- Inventor: Zhao Yuan , Markus K. Tilsch , Georg J. Ockenfuss , Marius Grigonis , Andrew Clark , Donggong Peng , Yinxiang Xia , Eric Nybank , Neil Pinkerton
- Applicant: VIAVI Solutions Inc.
- Applicant Address: US CA San Jose
- Assignee: VIAVI Solutions Inc.
- Current Assignee: VIAVI Solutions Inc.
- Current Assignee Address: US AZ Chandler
- Agency: Harrity & Harrity, LLP
- International Application: PCT/CN2018/108297 2018.09.28
- International Announcement: WO2020/062016A 2020.04.02
- Date entered country: 2019-12-05
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/54 ; C23C14/35 ; C23C14/00 ; C23C14/52

Abstract:
A device may include one or more memories and one or more processors, communicatively coupled to the one or more memories, to receive design information, wherein the design information identifies desired values for a set of layers of an optical element to be generated during one or more runs; receive or obtain historic information identifying a relationship between a parameter for the one or more runs and an observed value relating to the one or more runs or the optical element; determine layer information for the one or more runs based on the historic information, wherein the layer information identifies run parameters, for the set of layers, to achieve the desired values; and cause the one or more runs to be performed based on the layer information.
Public/Granted literature
- US20210332474A1 COATING CONTROL USING FORWARD PARAMETER CORRECTION AND ADAPTED REVERSE ENGINEERING Public/Granted day:2021-10-28
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