Invention Grant
- Patent Title: Pressure sensor including side-wall portion including shield electrode
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Application No.: US17399228Application Date: 2021-08-11
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Publication No.: US11692893B2Publication Date: 2023-07-04
- Inventor: Ryosuke Niwa , Koichi Yoshida
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP 2019045963 2019.03.13
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A pressure sensor includes a base substrate, a first insulating layer at the base substrate, a stationary electrode at the first insulating layer, a side-wall portion around the stationary electrode at the first insulating layer, and a membrane having electrical conductivity, facing the stationary electrode across a space, and supported by the side-wall portion. The side-wall portion includes a shield electrode on the first insulating layer and a second insulating layer on the shield electrode. A distance between the stationary electrode and the membrane is less than a distance between the shield electrode and the membrane.
Public/Granted literature
- US20210372876A1 PRESSURE SENSOR Public/Granted day:2021-12-02
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