Invention Grant
- Patent Title: Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides
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Application No.: US17377305Application Date: 2021-07-15
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Publication No.: US11693180B2Publication Date: 2023-07-04
- Inventor: Meisam Bahadori , Songbin Gong , Lynford L. Goddard
- Applicant: Board of Trustees of the University of Illinois
- Applicant Address: US IL Urbana
- Assignee: The Board of Trustees of the University of Illinois
- Current Assignee: The Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Lowenstein Sandler LLP
- Main IPC: G02B6/293
- IPC: G02B6/293 ; G02B6/12 ; G02F1/00 ; H01S5/10

Abstract:
An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.
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