Invention Grant
- Patent Title: Multi-axis MEMS mirror parking
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Application No.: US17108229Application Date: 2020-12-01
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Publication No.: US11693187B2Publication Date: 2023-07-04
- Inventor: Hsing Cheng , Kevin Yasumura
- Applicant: Google LLC
- Applicant Address: US CA Mountain View
- Assignee: Google LLC
- Current Assignee: Google LLC
- Current Assignee Address: US CA Mountain View
- Agency: Lerner David LLP
- Main IPC: G02B6/35
- IPC: G02B6/35 ; B81B3/00 ; H04B10/69

Abstract:
The present disclosure provides an improved method of parking a microelectromechanical system (MEMS) mirror in an array of MEMS mirrors to protect against single high voltage channel failures in a driver. Two separate voltages are applied to each MEMS mirror to move and park the mirror out of a camera sensor field of view in a servo system. For example, a first voltage may be applied in a positive X direction and a second voltage may be applied in a positive Y direction which will move the mirror in a diagonal direction. If one of the high voltage channels fail, the mirror will still be parked and outside of the camera sensor field of view. If a high voltage channel fails, the servo system can park a mirror affected by the failure in an opposite corner. Moreover, if 2-axis parking is not feasible, the mirror can use single-voltage parking.
Public/Granted literature
- US20210255399A1 Multi-Axis MEMS Mirror Parking Public/Granted day:2021-08-19
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