Invention Grant
- Patent Title: Microelectromechanical system (MEMS) scanner having actuator pairs cantilevered adjacent to opposite sides of a scanning mirror
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Application No.: US16996805Application Date: 2020-08-18
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Publication No.: US11693233B2Publication Date: 2023-07-04
- Inventor: Utku Baran
- Applicant: MICROSOFT TECHNOLOGY LICENSING, LLC
- Applicant Address: US WA Redmond
- Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
- Current Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
- Current Assignee Address: US WA Redmond
- Agency: Newport IP, LLC
- Agent Jacob P. Rohwer
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08

Abstract:
A microelectromechanical systems (MEMS) scanner having actuator pairs adjacent to sides of a scanning mirror. Actuator pairs include individual actuators that are physically located adjacent to opposite sides of the scanning mirror and that, upon activation, induce angular rotation into the scanning mirror. Torsional beam flexures suspend the scanning mirror from a frame structure and facilitate rotation of the scanning mirror about a rotational axis. During operation of the MEMS scanner, a drive signal may be applied to the actuator pair to cause each individual actuator, of the actuator pair, to deform in unison, thereby generating some degree of tip deflection. Since the torsional beam flexures are connected to the tips of the actuators via the lever arms, this tip deflection serves as actuator stroke that induces torsional deformation into the torsional beam flexure—thereby causing rotation of the scanning mirror about the rotational axis.
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