Invention Grant
- Patent Title: Liquid processing apparatus, liquid processing method, and computer-readable recording medium
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Application No.: US17130126Application Date: 2020-12-22
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Publication No.: US11693322B2Publication Date: 2023-07-04
- Inventor: Takuya Miura , Shougo Takahashi , Kouichirou Tanaka
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP 19233210 2019.12.24
- Main IPC: B08B3/02
- IPC: B08B3/02 ; G03F7/42 ; B08B3/08 ; B08B13/00 ; B08B5/02

Abstract:
A liquid processing apparatus includes a substrate holder configured to hold a substrate; a processing liquid supply configured to supply a processing liquid onto a front surface of the substrate; a gas supply configured to supply a gas onto the front surface of the substrate; and a controller. The gas supply includes a diffusion nozzle which is provided with multiple discharge openings respectively elongated at different angles with respect to the front surface of the substrate. The controller performs controlling the gas supply to jet the gas from the diffusion nozzle onto a region of the front surface of the substrate including at least a central portion thereof in a state that the processing liquid is supplied on the front surface of the substrate.
Public/Granted literature
- US20210191271A1 LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER-READABLE RECORDING MEDIUM Public/Granted day:2021-06-24
Information query
IPC分类: