Invention Grant
- Patent Title: Reflector and method of manufacturing a reflector
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Application No.: US17409213Application Date: 2021-08-23
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Publication No.: US11694821B2Publication Date: 2023-07-04
- Inventor: Ferry Zijp
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP 178127 2018.06.15
- The original application number of the division: US16440099 2019.06.13
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G21K1/06 ; B24C1/08

Abstract:
A reflector comprising a hollow body having an interior surface defining a passage through the hollow body, the interior surface having at least one optical surface part configured to reflect radiation and a supporter surface part, wherein the optical surface part has a predetermined optical power and the supporter surface part does not have the predetermined optical power. The reflector is made by providing an axially symmetric mandrel;
shaping a part of the circumferential surface of the mandrel to form at least one inverse optical surface part that is not rotationally symmetric about the axis of the mandrel;
forming a reflector body around the mandrel; and
releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.
shaping a part of the circumferential surface of the mandrel to form at least one inverse optical surface part that is not rotationally symmetric about the axis of the mandrel;
forming a reflector body around the mandrel; and
releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.
Public/Granted literature
- US20210383940A1 REFLECTOR AND METHOD OF MANUFACTURING A REFLECTOR Public/Granted day:2021-12-09
Information query
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