Invention Grant
- Patent Title: Method and system for generating a diffraction image
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Application No.: US17374459Application Date: 2021-07-13
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Publication No.: US11694874B2Publication Date: 2023-07-04
- Inventor: Bart Buijsse , Bart Jozef Janssen
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/26 ; H01J37/295

Abstract:
Method and system for generating a diffraction image comprises acquiring multiple frames from a direct-detection detector responsive to irradiating a sample with an electron beam. Multiple diffraction peaks in the multiple frames are identified. A first dose rate of at least one diffraction peak in the identified diffraction peaks is estimated in the counting mode. If the first dose rate is not greater than a threshold dose rate, a diffraction image including the diffraction peak is generated by counting electron detection events. Values of pixels belonging to the diffraction peak are determined with a first set of counting parameter values corresponding to a first coincidence area. Values of pixels not belonging to any of the multiple diffraction peaks are determined using a second, set of counting parameter values corresponding to a second, different, coincidence area.
Public/Granted literature
- US20230020957A1 METHOD AND SYSTEM FOR GENERATING A DIFFRACTION IMAGE Public/Granted day:2023-01-19
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