Invention Grant
- Patent Title: Apparatus, method and recording medium storing command for inspection
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Application No.: US17280037Application Date: 2019-10-11
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Publication No.: US11694916B2Publication Date: 2023-07-04
- Inventor: Jung Woo Park , Byung Sun Oh
- Applicant: KOH YOUNG TECHNOLOGY INC.
- Applicant Address: KR Seoul
- Assignee: KOH YOUNG TECHNOLOGY INC.
- Current Assignee: KOH YOUNG TECHNOLOGY INC.
- Current Assignee Address: KR Seoul
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR 20180122323 2018.10.15
- International Application: PCT/KR2019/013396 2019.10.11
- International Announcement: WO2020/080758A 2020.04.23
- Date entered country: 2021-03-25
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01B11/25

Abstract:
The present disclosure provides an apparatus. The apparatus according to the present disclosure comprises: at least one first light source configured to irradiate illumination light to an object on a reference surface; at least one second light source configured to irradiate pattern light to the object, a plurality of cameras configured to capture one or more illumination images and one or more pattern images; and one or more processors configured to determine a plurality of outlines indicating edges of the object based on two or more images captured in different directions among the one or more illumination images and the one or more pattern images; determine a virtual plane corresponding to an upper surface of the object based on the plurality of outlines; and determine an angle between the virtual plane and the reference plane.
Public/Granted literature
- US20220037175A1 APPARATUS, METHOD AND RECORDING MEDIUM STORING COMMAND FOR INSPECTION Public/Granted day:2022-02-03
Information query
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