Invention Grant
- Patent Title: Bowl shaped pad
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Application No.: US16158042Application Date: 2018-10-11
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Publication No.: US11694976B2Publication Date: 2023-07-04
- Inventor: Yuhong Cai , Sireesha Gogineni , Yi Xu
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
Embodiments described herein provide techniques for forming an interconnect structure that includes a bowl shaped pad. Such embodiments can assist with improving interconnect joint reliability when compared to conventional pads that have a flat surface. An interconnect structure may comprise: a substrate (e.g., a semiconductor package, a PCB, etc.); and a metal pad over the substrate. The metal pad has a center region and an edge region. A thickness of the center region is smaller than a thickness of the edge region. A thickness of the center region may be non-uniform. The center region may have a bowl shape characterized by a stepped profile. The stepped profile is formed from metal layers arranged as steps. Alternatively, or additionally, the center region may have a bowl shape characterized by a curved profile. A pattern may be formed on or in a surface of the metal pad.
Information query
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