Invention Grant
- Patent Title: Vias in composite IC chip structures
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Application No.: US17500824Application Date: 2021-10-13
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Publication No.: US11694986B2Publication Date: 2023-07-04
- Inventor: Adel Elsherbini , Patrick Morrow , Johanna Swan , Shawna Liff , Mauro Kobrinksy , Van Le , Gerald Pasdast
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- The original application number of the division: US16586158 2019.09.27
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/528 ; H01L23/522 ; H01L25/18 ; H01L25/00 ; H01L21/768 ; H01L21/82 ; H01L23/48 ; H01L25/065

Abstract:
A composite integrated circuit (IC) device structure comprising a host chip and a chiplet. The host chip comprises a first device layer and a first metallization layer. The chiplet comprises a second device layer and a second metallization layer that is interconnected to transistors of the second device layer. A top metallization layer comprising a plurality of first level interconnect (FLI) interfaces is over the chiplet and host chip. The chiplet is embedded between a first region of the first device layer and the top metallization layer. The first region of the first device layer is interconnected to the top metallization layer by one or more conductive vias extending through the second device layer or adjacent to an edge sidewall of the chiplet.
Public/Granted literature
- US20220037281A1 VIAS IN COMPOSITE IC CHIP STRUCTURES Public/Granted day:2022-02-03
Information query
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