Invention Grant
- Patent Title: Semiconductor device and method of manufacturing semiconductor device
-
Application No.: US17322770Application Date: 2021-05-17
-
Publication No.: US11695065B2Publication Date: 2023-07-04
- Inventor: Ze Chen
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP 20139278 2020.08.20
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L29/06 ; H01L21/265 ; H01L29/66

Abstract:
Provided are a semiconductor device in which the lifetime of holes is controlled and the switching loss is suppressed, and a method of manufacturing the same. Provided are a semiconductor substrate having a drift layer of a first conductivity type between a first main surface and a second main surface opposite to the first main surface, a first buffer layer of the first conductive type provided between the drift layer and the second main surface in contact with the drift layer, having a resistivity lower than that of the drift layer, and having an impurity concentration higher than that of the drift layer, and a high resistivity layer provided between the first buffer layer and the second main surface and having a resistivity higher than that of the drift layer.
Public/Granted literature
- US20220059680A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2022-02-24
Information query
IPC分类: