Invention Grant
- Patent Title: Chip-scale resonant gyrator for passive non-reciprocal devices
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Application No.: US16947059Application Date: 2020-07-16
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Publication No.: US11695382B2Publication Date: 2023-07-04
- Inventor: Songbin Gong , Ruochen Lu , Tomas Manzaneque Garcia , Cheng Tu , Daniel Shoemaker , Chengxi Zhao
- Applicant: Board of Trustees of the University of Illinois
- Applicant Address: US IL Urbana
- Assignee: The Board of Trustees of the University of Illinois
- Current Assignee: The Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Lowenstein Sandler LLP
- The original application number of the division: US15790999 2017.10.23
- Main IPC: H03H7/00
- IPC: H03H7/00 ; H03C1/46 ; H03H2/00 ; H01F10/12 ; H01F10/26 ; H01F21/08 ; H01F10/20 ; H10N30/00

Abstract:
A method includes depositing a first metal layer on a semiconductor substrate; etching the first metal layer to form a first electrode having a first lead; depositing a piezoelectric layer on the semiconductor substrate and first electrode; etching the piezoelectric layer to a shape of the gyrator to be formed within the circulator; depositing a second metal layer on the piezoelectric layer; etching the second metal layer to form a second electrode having a second lead, the second electrode being positioned opposite the first electrode, wherein the first lead and the second lead form an electrical port; depositing a magnetostrictive layer on the second electrode; etching the magnetostrictive layer to approximately the shape of the piezoelectric layer; depositing a third metal layer on the magnetostrictive layer; and etching the third metal layer to form a metal coil that has a gap on one side to define a magnetic port.
Public/Granted literature
- US20200350884A1 CHIP-SCALE RESONANT GYRATOR FOR PASSIVE NON-RECIPROCAL DEVICES Public/Granted day:2020-11-05
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