Invention Grant
- Patent Title: Acoustic resonator device with controlled placement of functionalization material
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Application No.: US17884888Application Date: 2022-08-10
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Publication No.: US11695384B2Publication Date: 2023-07-04
- Inventor: Matthew Ryder , Rio Rivas , Thayne Edwards
- Applicant: Qorvo Biotechnologies, LLC
- Applicant Address: US MN Plymouth
- Assignee: Qorvo Biotechnologies, LLC
- Current Assignee: Qorvo Biotechnologies, LLC
- Current Assignee Address: US MN Plymouth
- Agency: Haynes and Boone, LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; G01N29/02 ; G01N29/036 ; G01N33/536 ; H03H3/02 ; H03H9/13 ; H03H9/17 ; H03H9/15

Abstract:
A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.
Public/Granted literature
- US20220385262A1 ACOUSTIC RESONATOR DEVICE WITH CONTROLLED PLACEMENT OF FUNCTIONALIZATION MATERIAL Public/Granted day:2022-12-01
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