Invention Grant
- Patent Title: Memory device and method of forming the same
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Application No.: US17234813Application Date: 2021-04-20
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Publication No.: US11696448B2Publication Date: 2023-07-04
- Inventor: Hung-Chang Sun , Sheng-Chih Lai , TsuChing Yang , Yu-Wei Jiang , Kuo-Chang Chiang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H10B51/20 ; H01L21/02 ; H01L29/24 ; H10B51/30

Abstract:
A device includes a dielectric layer, a conductive layer, electrode layers and an oxide semiconductor layer. The dielectric layer has a first surface and a second surface opposite to the first surface. The conductive layer is disposed on the first surface of the dielectric layer. The electrode layers are disposed on the second surface of the dielectric layer. The oxide semiconductor layer is disposed in between the second surface of the dielectric layer and the electrode layers, wherein the oxide semiconductor layer comprises a material represented by formula 1 (InxSnyTizMmOn). In formula 1, 0
Public/Granted literature
- US20210399017A1 MEMORY DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2021-12-23
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