Invention Grant
- Patent Title: Mask, method for manufacturing the same, and method for manufacturing display panel
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Application No.: US17067730Application Date: 2020-10-11
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Publication No.: US11696486B2Publication Date: 2023-07-04
- Inventor: Jinoh Kwag , Sungsoon Im , Youngmin Moon , Ji-Hee Son , Seungyong Song , DuckJung Lee , Hye Yong Chu
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR 20200004066 2020.01.13
- Main IPC: H01L51/56
- IPC: H01L51/56 ; C23C14/04 ; H01L51/00 ; H01L27/32 ; H10K71/00 ; H10K59/121 ; H10K71/16

Abstract:
Provided is a mask having a plurality of cell areas, each of which has a plurality of through-portions defined therein. The mask includes a mask film including a polymer and a conductive layer disposed on at least one surface of the mask film and including conductive metal or a conductive metal oxide. Accordingly, precision of a deposition process is enhanced while reducing process time and costs in a manufacturing process of the mask, and thus the yield in manufacturing a display panel using the mask is improved. Therefore, the display panel manufactured using the mask may have improved reliability.
Public/Granted literature
- US20210217997A1 MASK, METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR MANUFACTURING DISPLAY PANEL Public/Granted day:2021-07-15
Information query
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