Invention Grant
- Patent Title: Piezoelectric device with orientation control layer formed of sazo and manufacturing method thereof
-
Application No.: US16497969Application Date: 2018-03-08
-
Publication No.: US11696506B2Publication Date: 2023-07-04
- Inventor: Masaharu Arimoto , Hironobu Machinaga , Masato Katsuda , Manami Kurose
- Applicant: NITTO DENKO CORPORATION
- Applicant Address: JP Ibaraki
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Ibaraki
- Agency: Hauptman Ham, LLP
- Priority: JP 17065547 2017.03.29
- International Application: PCT/JP2018/009015 2018.03.08
- International Announcement: WO2018/180340A 2018.10.04
- Date entered country: 2019-09-26
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H01L41/047 ; H01L41/113 ; H01L41/187 ; H01L41/316 ; H01L41/319 ; H10N30/00 ; H10N30/076 ; H10N30/079 ; H10N30/30 ; H10N30/853 ; H10N30/87

Abstract:
A piezoelectric device has a layered structure in which at least a first electrode, a plastic layer, an orientation control layer, a piezoelectric layer, and a second electrode are stacked, wherein the orientation control layer is amorphous, and the piezoelectric layer with a thickness of 20 nm to 250 nm is provided over the orientation control layer, the piezoelectric layer having a wurtzite crystal structure, and wherein the orientation control layer and the piezoelectric layer are provided between the first electrode and the second electrode.
Public/Granted literature
- US20200381610A1 PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-12-03
Information query
IPC分类: