Invention Grant
- Patent Title: Probe, method of manufacturing a probe and scanning probe microscopy system
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Application No.: US16760210Application Date: 2018-10-31
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Publication No.: US11698389B2Publication Date: 2023-07-11
- Inventor: Roelof Willem Herfst , Albert Dekker , Anton Adriaan Bijnagte , Jan Jacobus Benjamin Biemond
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL 's-Gravenhage
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL 's-Gravenhage
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: EP 199494 2017.11.01
- International Application: PCT/NL2018/050725 2018.10.31
- International Announcement: WO2019/088833A 2019.05.09
- Date entered country: 2020-04-29
- Main IPC: G01Q70/02
- IPC: G01Q70/02 ; G01Q70/16 ; G01Q70/10

Abstract:
This document relates to a probe for use in a scanning probe microscopy device. The probe comprises a cantilever and a probe tip being located at a first end section of the cantilever. The cantilever is configured for bending in a Z-direction perpendicular to a surface of a substrate in use. The cantilever comprises a neck section and a paddle section, and the probe tip is located on the paddle section. The neck section has a width and height in cross section thereof, comprises a base part having a rectangular cross section. The cantilever at least across a length of the neck section comprises a ridge extending in a direction away from the base part. The base part and the ridge together define the width and height of the neck section, and have dimensions such that a vertical bending stiffness of the cantilever for bending in the Z-direction matches a lateral stiffness of the cantilever with respect to forces acting on the probe tip in a direction transverse to the Z-direction. The document further describes a manufacturing method.
Public/Granted literature
- US20230160924A1 PROBE, METHOD OF MANUFACTURING A PROBE AND SCANNING PROBE MICROSCOPY SYSTEM Public/Granted day:2023-05-25
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