Invention Grant
- Patent Title: Temperature control for bottom emitting wafer-level vertical cavity surface emitting laser testing
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Application No.: US17664448Application Date: 2022-05-23
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Publication No.: US11698411B2Publication Date: 2023-07-11
- Inventor: Eric R. Hegblom
- Applicant: Lumentum Operations LLC
- Applicant Address: US CA San Jose
- Assignee: Lumentum Operations LLC
- Current Assignee: Lumentum Operations LLC
- Current Assignee Address: US CA San Jose
- Agency: Harrity & Harrity, LLP
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R31/44 ; H01S3/04 ; H01S5/42 ; H01S5/183 ; H01S5/00

Abstract:
A testing device may include a stage associated with holding an emitter wafer during testing of an emitter. The stage may be arranged such that light emitted by the emitter passes through the stage. The testing device may include a heat sink arranged such that the light emitted by the emitter during the testing is emitted in a direction away from the heat sink, and such that a first surface of the heat sink is near a surface of the emitter wafer during the testing but does not contact the surface of the emitter wafer. The testing device may include a probe card, associated with performing the testing of the emitter, that is arranged over a second surface of the heat sink such that, during the testing of the emitter, a probe of the probe card contacts a probe pad for the emitter through an opening in the heat sink.
Public/Granted literature
- US20220283220A1 TEMPERATURE CONTROL FOR BOTTOM EMITTING WAFER-LEVEL VERTICAL CAVITY SURFACE EMITTING LASER TESTING Public/Granted day:2022-09-08
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