Invention Grant
- Patent Title: Light source device, illuminating apparatus, exposing apparatus, and method for manufacturing article
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Application No.: US17031647Application Date: 2020-09-24
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Publication No.: US11698589B2Publication Date: 2023-07-11
- Inventor: Noboru Osaka
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP 19176262 2019.09.26
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00

Abstract:
To uniformize the light intensity distribution on an irradiated surface in a light source device including a light-emitting diode (LED) array, a light source device includes a light-emitting diode (LED) array including a circuit having a substrate, a plurality of LED chips on the substrate, and a power supply. A predetermined plane is illuminated with light from the LED array. The plurality of LED chips includes first LED chips and second LED chips different from the first LED chips placed in a same column of the circuit, and the first LED chips have a placement angle different from a placement angle of the second LED chips.
Public/Granted literature
- US20210096466A1 LIGHT SOURCE DEVICE, ILLUMINATING APPARATUS, EXPOSING APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE Public/Granted day:2021-04-01
Information query
IPC分类: