Invention Grant
- Patent Title: Cutting apparatus
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Application No.: US17215118Application Date: 2021-03-29
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Publication No.: US11699606B2Publication Date: 2023-07-11
- Inventor: Yoshimasa Kojima , Jun Nakama , Satoshi Hanajima
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP 20066791 2020.04.02
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687

Abstract:
A cutting apparatus includes a table including a support plate transparent in a visible region, a cutting unit, a first feeding mechanism that includes a first moving section for supporting the table and a first motor, a second feeding mechanism that includes a second moving section for supporting the cutting unit and a second motor, a first camera disposed on the side of a first surface of the support plate, a second camera disposed on the side of a second surface opposite to the first surface of the support plate, and a storage section that stores positional deviation amounts in the X-axis direction and the Y-axis direction between an imaging region at a reference position of the first camera and an imaging region at a reference position of the second camera.
Public/Granted literature
- US20210313208A1 CUTTING APPARATUS Public/Granted day:2021-10-07
Information query
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