Invention Grant
- Patent Title: Selective nitrided gate-oxide for RTS noise and white-pixel reduction
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Application No.: US16738981Application Date: 2020-01-09
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Publication No.: US11700464B2Publication Date: 2023-07-11
- Inventor: Seong Yeol Mun
- Applicant: OmniVision Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H04N25/63 ; H01L27/146 ; H04N25/75

Abstract:
A pixel cell includes a nitrogen-implanted region at a semiconductor material-gate oxide proximate interface located in a region above a photodiode. The pixel cell is further devoid of implanted nitrogen in channel regions of a plurality of pixel transistors. Thus, Si—N bonds are formed at the semiconductor material-gate oxide interface in the region above the photodiode, while the channel regions are protected from nitrogen implantation at the semiconductor material-gate oxide interface. Methods of forming the pixel cell are also described.
Public/Granted literature
- US20210218914A1 SELECTIVE NITRIDED GATE-OXIDE FOR RTS NOISE AND WHITE-PIXEL REDUCTION Public/Granted day:2021-07-15
Information query
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