Invention Grant
- Patent Title: Transport robot and substrate treating apparatus comprising the same
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Application No.: US16911779Application Date: 2020-06-25
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Publication No.: US11702299B2Publication Date: 2023-07-18
- Inventor: Sang-Oh Kim , Jun Ho Song , Myungjin Lee , Heejae Byun
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: RatnerPrestia
- Priority: KR 20190076321 2019.06.26
- Main IPC: B65G54/02
- IPC: B65G54/02 ; B65G47/90 ; H01L21/677 ; H01L21/67

Abstract:
Provided is a transport robot and a substrate treating apparatus including the transport robot. The substrate treating apparatus includes a transport chamber having a long shape on one side, and for providing a moving space of a substrate, a load lock chamber connected to the transport chamber to provide an exchange space between the transport chamber and a substrate before a process or a substrate after a process, a process unit connected to the transport chamber to perform a process for a substrate transferred from the transport chamber, a track provided in the transport chamber to provide a moving path of a substrate, and a transport robot capable of moving along the track in a non-contact manner, and entering or exiting the load lock chamber to perform a substrate exchange between the load lock chamber and the transport chamber.
Information query
IPC分类: