Invention Grant
- Patent Title: Adhesive sheet for temporary fixation and method of manufacturing semiconductor device using the same
-
Application No.: US16762863Application Date: 2019-03-28
-
Publication No.: US11702571B2Publication Date: 2023-07-18
- Inventor: Sera Kim , Ji Ho Han , Kwang Joo Lee
- Applicant: LG CHEM, LTD.
- Applicant Address: KR Seoul
- Assignee: LG CHEM, LTD.
- Current Assignee: LG CHEM, LTD.
- Current Assignee Address: KR Seoul
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: KR 20180035996 2018.03.28 KR 20190034621 2019.03.26
- International Application: PCT/KR2019/003668 2019.03.28
- International Announcement: WO2019/190242A 2019.10.03
- Date entered country: 2020-05-08
- Main IPC: C09J7/22
- IPC: C09J7/22 ; C09J7/40 ; C09J133/08 ; C09J133/24 ; C09J7/38 ; C09J167/02 ; H01L21/683

Abstract:
An adhesive sheet for temporary fixation which may have excellent heat resistance to exhibit a sufficient adhesive force even though it undergoes a high temperature process during a process of manufacturing a semiconductor device and may also exhibit a sufficient reduction of the adhesive force by photocuring during the step of peeling off, and a method of manufacturing a semiconductor device using the same, are provided.
Public/Granted literature
- US20210171802A1 ADHESIVE SHEET FOR TEMPORARY FIXATION AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME Public/Granted day:2021-06-10
Information query
IPC分类: