Invention Grant
- Patent Title: Nozzle and nozzle head
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Application No.: US16755712Application Date: 2018-10-17
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Publication No.: US11702745B2Publication Date: 2023-07-18
- Inventor: Pekka Soininen , Mika Jauhiainen
- Applicant: Beneq Oy
- Applicant Address: FI Espoo
- Assignee: BENEQ OY
- Current Assignee: BENEQ OY
- Current Assignee Address: FI Espoo
- Agency: Carter, DeLuca & Farrell LLP
- Agent Robert P. Michal
- Priority: FI 175919 2017.10.18
- International Application: PCT/FI2018/050756 2018.10.17
- International Announcement: WO2019/077205A 2019.04.25
- Date entered country: 2020-04-13
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/54

Abstract:
The invention relates to a nozzle and nozzle head arranged to supply gas towards a surface of a substrate The nozzle comprises a nozzle output surface via which the gas is supplied towards the surface of the substrate, a nozzle top surface opposite the nozzle output surface, and a nozzle side wall extending between the nozzle output surface and the nozzle top surface. The nozzle further comprises at least one recess provided to the nozzle side wall, the at least one recess extending between the nozzle top surface and the nozzle output surface for providing a gas passage from the nozzle top surface to the nozzle output surface when the nozzle side wall is against a counter surface.
Information query
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