Invention Grant
- Patent Title: Temperature control system and integrated temperature control system
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Application No.: US17092891Application Date: 2020-11-09
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Publication No.: US11703284B2Publication Date: 2023-07-18
- Inventor: Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
- Applicant: CKD CORPORATION , EBARA CORPORATION , EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO., LTD.
- Applicant Address: JP Aichi
- Assignee: CKD CORPORATION,EBARA CORPORATION,EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO., LTD.
- Current Assignee: CKD CORPORATION,EBARA CORPORATION,EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO., LTD.
- Current Assignee Address: JP Aichi; JP Tokyo; JP Tokyo
- Agency: Osha Bergman Watanabe & Burton LLP
- Priority: JP 19203218 2019.11.08
- Main IPC: F28F27/02
- IPC: F28F27/02 ; F28D20/00 ; F28D20/02 ; F28D21/00 ; H01L21/67

Abstract:
A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.
Public/Granted literature
- US20210140719A1 TEMPERATURE CONTROL SYSTEM AND INTEGRATED TEMPERATURE CONTROL SYSTEM Public/Granted day:2021-05-13
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