Invention Grant
- Patent Title: Fused quartz dual shell resonator and method of fabrication
-
Application No.: US16836387Application Date: 2020-03-31
-
Publication No.: US11703330B2Publication Date: 2023-07-18
- Inventor: Andrei M. Shkel , Mohammad H. Asadian Ardakani , Yusheng Wang
- Applicant: The Regents of the University of California
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Stites & Harbison PLLC
- Agent John P. Teresinski
- Main IPC: G01C19/5719
- IPC: G01C19/5719 ; B81C1/00 ; H03H3/007 ; H03H9/10 ; B81B3/00 ; G01C19/5691 ; B81B7/00

Abstract:
A dual-shell architecture and methods of fabrication of fused quartz resonators is disclosed. The architecture may include two encapsulated and concentric cavities using plasma-activated wafer bonding followed by the high-temperature glassblowing. The dual-shell architecture can provide a protective shield as well as a “fixed-fixed” anchor for the sensing element of the resonators. Structures can be instrumented to operate as a resonator, a gyroscope, or other vibratory sensor and for precision operation in a harsh environment. Methods for fabricating a dual-shell resonator structure can include pre-etching cavities on a cap wafer, pre-etching cavities on a device wafer, bonding the device wafer to a substrate wafer to form a substrate pair and aligning and bonding the cap wafer to the substrate pair to form a wafer stack with aligned cavities including a cap cavity and a device cavity. The wafer stack may be glassblown to form a dual-shell structure.
Public/Granted literature
- US20200309527A1 FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION Public/Granted day:2020-10-01
Information query