Invention Grant
- Patent Title: Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
-
Application No.: US17205562Application Date: 2021-03-18
-
Publication No.: US11703331B2Publication Date: 2023-07-18
- Inventor: Khalil Najafi , Sajal Singh , Jae Yoong Cho
- Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Applicant Address: US MI Ann Arbor
- Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Current Assignee Address: US MI Ann Arbor
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G01C19/5783
- IPC: G01C19/5783 ; G01C19/00 ; H03H3/007 ; G01C19/5691 ; B81B3/00 ; H03H9/02 ; G01C19/5684 ; B81C1/00 ; H03H9/24

Abstract:
Three-dimensional (3D) micro-scale shells are presented with openings of various sizes and geometries on the surface. The shell consist of a suspended ring-shaped resonator, multiple support beams, a support post, and a cap region that connects the support beams to the support post. Shells with openings of various sizes and geometries allow the creation of micro electromechanical systems (MEMS) sensors and actuators with a wide range of engineered mechanical and electrical properties. The openings on the shell surface can, for example, control the mechanical quality factor (Q) and resonance frequencies of the shell when the shell is used as a suspended proof mass of a mechanical resonator of a vibratory gyroscope. The shells can also serve as mechanical supporting layers and/or an electrode connection layer for MEMS actuators and sensors that use 3D shells as proof masses.
Public/Granted literature
Information query