Invention Grant
- Patent Title: Contact resistor test method and device
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Application No.: US17491950Application Date: 2021-10-01
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Publication No.: US11703531B2Publication Date: 2023-07-18
- Inventor: Shih-Chieh Lin
- Applicant: Changxin Memory Technologies, Inc.
- Applicant Address: CN Anhui
- Assignee: Changxin Memory Technologies, Inc.
- Current Assignee: Changxin Memory Technologies, Inc.
- Current Assignee Address: CN Hefei
- Agency: Sheppard Mullin Richter & Hampton LLP
- Priority: CN 2110551274.X 2021.05.20
- Main IPC: G01R27/08
- IPC: G01R27/08 ; G01R27/20 ; G01R31/28

Abstract:
A contact resistance test method and related devices are provided. When a MOS transistor working in a linear region is tested, a functional relationship between the channel width of the MOS transistor and total resistances of the MOS transistor at sampling temperatures is determined, to determine the contact resistance of the MOS transistor at the sampling temperatures. A calibration coefficient of the contact resistance at a current ambient temperature is determined based on the contact resistance of the MOS transistor at the sampling temperatures. A measurement result of the contact resistance is further adjusted based on the calibration coefficient of the contact resistance at the current ambient temperature, to obtain an accurate contact resistance at the current ambient temperature.
Public/Granted literature
- US20220373584A1 CONTACT RESISTOR TEST METHOD AND DEVICE Public/Granted day:2022-11-24
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