Invention Grant
- Patent Title: Semiconductor inspecting method for ensuring scrubbing length on pad
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Application No.: US17524788Application Date: 2021-11-12
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Publication No.: US11703541B2Publication Date: 2023-07-18
- Inventor: Volker Hansel , Sebastian Giessmann , Frank Fehrmann , Chien-Hung Chen
- Applicant: MPI Corporation
- Applicant Address: TW Hsinchu Hsiang
- Assignee: MPI Corporation
- Current Assignee: MPI Corporation
- Current Assignee Address: TW Hsinchu Hsiang
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L21/66

Abstract:
A semiconductor inspecting method for ensuring a scrubbing length on a pad includes following steps. First off, a first position of a probe needle from above is defined. In addition, a wafer comprising at least a pad is placed on a wafer chuck of a semiconductor inspecting system. Thereafter, a relative vertical movement between the probe needle and the pad is made by adopting a driving system of the semiconductor inspecting system to generate a scrubbing length on the pad. Next, whether the scrubbing length is equal to or larger than a preset value or not is recognized by adopting the vision system and the relative vertical movement is stopped by adopting the driving system.
Public/Granted literature
- US20220155365A1 SEMICONDUCTOR INSPECTING METHOD FOR ENSURING SCRUBBING LENGTH ON PAD Public/Granted day:2022-05-19
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