Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US17086622Application Date: 2020-11-02
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Publication No.: US11705308B2Publication Date: 2023-07-18
- Inventor: Shintaro Ikeda , Hidetoshi Hanaoka , Naoki Tamaru
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP 19204977 2019.11.12
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/16

Abstract:
There is provision of a plasma processing apparatus including a processing vessel, a first member provided in the processing vessel, and a second member provided outside the first member. In at least one of the first member and the second member, a gas flow passage is formed, and the gas flow passage is configured to cause a gas to flow into a gap between the first member and the second member.
Public/Granted literature
- US20210142983A1 PLASMA PROCESSING APPARATUS Public/Granted day:2021-05-13
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