- Patent Title: Substrate for electronic device and method for producing the same
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Application No.: US17617091Application Date: 2020-04-30
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Publication No.: US11705330B2Publication Date: 2023-07-18
- Inventor: Kazunori Hagimoto , Shouzaburo Goto
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 19129089 2019.07.11
- International Application: PCT/JP2020/018262 2020.04.30
- International Announcement: WO2021/005872A 2021.01.14
- Date entered country: 2021-12-07
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/26

Abstract:
A substrate for an electronic device, including a nitride semiconductor film formed on a joined substrate including a silicon single crystal, where the joined substrate has a plurality of silicon single crystal substrates that are joined and has a thickness of more than 2000 μm, and the plurality of silicon single crystal substrates are produced by a CZ method and have a resistivity of 0.1 Ωcm or lower. This provides: a substrate for an electronic device having a nitride semiconductor film formed on a silicon substrate, where the substrate for an electronic device can suppress a warp and can also be used for a product with a high breakdown voltage; and a method for producing the same.
Public/Granted literature
- US20220238326A1 SUBSTRATE FOR ELECTRONIC DEVICE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2022-07-28
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