Three-dimensional memory device and manufacturing method thereof
Abstract:
A three-dimensional memory device includes a plurality of row lines stacked alternately with a plurality of interlayer dielectric layers in a vertical direction on a substrate, and each of the plurality of row lines having a projection from a side surface thereof; and a plurality of vias extending in the vertical direction from the substrate, each coupled to the projection of a corresponding row line, and electrically coupling the plurality of row lines to a peripheral circuit defined below the substrate.
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