- Patent Title: Three-dimensional memory device and manufacturing method thereof
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Application No.: US17225517Application Date: 2021-04-08
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Publication No.: US11705397B2Publication Date: 2023-07-18
- Inventor: Chan Ho Yoon , Jin Ho Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR 20200161361 2020.11.26
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01L21/768 ; H10B41/27 ; H10B41/41 ; H10B43/27 ; H10B43/40

Abstract:
A three-dimensional memory device includes a plurality of row lines stacked alternately with a plurality of interlayer dielectric layers in a vertical direction on a substrate, and each of the plurality of row lines having a projection from a side surface thereof; and a plurality of vias extending in the vertical direction from the substrate, each coupled to the projection of a corresponding row line, and electrically coupling the plurality of row lines to a peripheral circuit defined below the substrate.
Public/Granted literature
- US20220165667A1 THREE-DIMENSIONAL MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-05-26
Information query
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