Invention Grant
- Patent Title: Semiconductor memory device and method of manufacturing the semiconductor memory device
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Application No.: US16953786Application Date: 2020-11-20
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Publication No.: US11705501B2Publication Date: 2023-07-18
- Inventor: Nam Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR 20200076048 2020.06.22
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/10 ; H10B43/27

Abstract:
Provided herein may be a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a stacked body including interlayer insulating layers and a select line disposed between the interlayer insulating layers, a core insulating layer penetrating the stacked body, a semiconductor pattern extending along a sidewall of the core insulating layer and including an undoped area disposed between the select line and the core insulating layer, doped semiconductor patterns disposed between the semiconductor pattern and the interlayer insulating layers, and a gate insulating layer disposed between the semiconductor pattern and the select line.
Public/Granted literature
- US20210399112A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-12-23
Information query
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