- Patent Title: Semiconductor memory device and a method of manufacturing the same
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Application No.: US17490080Application Date: 2021-09-30
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Publication No.: US11706923B2Publication Date: 2023-07-18
- Inventor: Geun-won Lim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20180162155 2018.12.14
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B43/10 ; H10B43/35 ; H10B43/40

Abstract:
A semiconductor memory device including: a common source line; a substrate on the common source line; a plurality of gate electrodes arranged on the substrate and spaced apart from each other in a first direction perpendicular to a top surface of the common source line; a plurality of insulation films arranged among the plurality of gate electrodes; a plurality of channel structures penetrating through the plurality of gate electrodes and the plurality of insulation films in the first direction; and a plurality of residual sacrificial films arranged on the substrate and spaced apart from each other in the first direction, wherein the plurality of gate electrodes are disposed on opposite sides of the plurality of residual sacrificial films.
Public/Granted literature
- US20220020767A1 Semiconductor memory device and a method of manufacturing the same Public/Granted day:2022-01-20
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