- Patent Title: Photoelectric conversion element including first electrode, second electrodes, photoelectric conversion film, and conductive layer and method for manufacturing the same
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Application No.: US17313563Application Date: 2021-05-06
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Publication No.: US11711932B2Publication Date: 2023-07-25
- Inventor: Masaya Hirade , Manabu Nakata , Katsuya Nozawa , Yasunori Inoue
- Applicant: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP 18031899 2018.02.26
- The original application number of the division: US16274154 2019.02.12
- Main IPC: H01L51/44
- IPC: H01L51/44 ; H10K30/82 ; H10K30/30 ; H10K39/32 ; H10K71/13 ; H10K71/16 ; H10K71/20

Abstract:
A method for manufacturing a photoelectric conversion element includes providing a base structure including a semiconductor substrate having a principal surface, a first electrode located on or above the principal surface, second electrodes which are located on or above the principal surface and which are one- or two-dimensionally arranged, and a photoelectric conversion film covering at least the second electrodes; forming a mask layer on the photoelectric conversion film, the mask layer being conductive and including a covering section covering a portion of the photoelectric conversion film that overlaps the second electrodes in plan view; and partially removing the photoelectric conversion film by immersing the base structure and the mask layer in an etchant.
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