Invention Grant
- Patent Title: Robot vacuum control and monitoring system
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Application No.: US16916602Application Date: 2020-06-30
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Publication No.: US11712809B2Publication Date: 2023-08-01
- Inventor: Frantisek Pavlik , James Thomas McCartney, III
- Applicant: WaferPath, Inc.
- Applicant Address: US CA Milpitas
- Assignee: WaferPath, Inc.
- Current Assignee: WaferPath, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: B25J9/16
- IPC: B25J9/16 ; B25J11/00 ; B25J13/08 ; B25J15/06 ; H01L21/687 ; B25J9/04

Abstract:
A method of operating a robot including a vacuum port for engaging an item, e.g. a wafer, is disclosed. The method includes operating, by a computer system, the robot in a first state, detecting using a vacuum sensor, a transition of a vacuum parameter from a first vacuum parameter zone to a second parameter zone in a plurality of vacuum parameter zones. Based on detecting the transition of the vacuum parameter from the first vacuum parameter zone to the second vacuum parameter zone, the operating state of the robot is altered from the first state to a second state. Also disclosed is an item transfer robot as part of an item transfer system.
Public/Granted literature
- US20210402614A1 ROBOT VACUUM CONTROL AND MONITORING SYSTEM Public/Granted day:2021-12-30
Information query
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