Invention Grant
- Patent Title: Packaging method and associated packaging structure
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Application No.: US17444212Application Date: 2021-08-02
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Publication No.: US11713241B2Publication Date: 2023-08-01
- Inventor: Chih-Ming Chen , Yuan-Chih Hsieh , Chung-Yi Yu
- Applicant: Taiwan Semiconductor Manufacturing Company Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- The original application number of the division: US15088130 2016.04.01
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; H01L23/488 ; H01L25/00 ; H01L23/00

Abstract:
The present disclosure provides a packaging method, including: providing a first semiconductor substrate; forming a bonding region on the first semiconductor substrate, wherein the bonding region of the first semiconductor substrate includes a first bonding metal layer and a second bonding metal layer; providing a second semiconductor substrate having a bonding region, wherein the bonding region of the second semiconductor substrate includes a third bonding layer; and bonding the first semiconductor substrate to the second semiconductor substrate by bringing the bonding region of the first semiconductor substrate in contact with the bonding region of the second semiconductor substrate; wherein the first and third bonding metal layers include copper (Cu), and the second bonding metal layer includes Tin (Sn). An associated packaging structure is also disclosed.
Public/Granted literature
- US20220017363A1 PACKAGING METHOD AND ASSOCIATED PACKAGING STRUCTURE Public/Granted day:2022-01-20
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