Invention Grant
- Patent Title: Method for forming chalcogenide thin film
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Application No.: US17569098Application Date: 2022-01-05
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Publication No.: US11713518B2Publication Date: 2023-08-01
- Inventor: Unyong Jeong , Giri Anupam , Geonwoo Kim , Ghorai Arup
- Applicant: POSTECH Research and Business Development Foundation
- Applicant Address: KR Pohang-Si
- Assignee: POSTECH RESEARCH AND BUSINESS DEVELOPMENT FOUNDATION
- Current Assignee: POSTECH RESEARCH AND BUSINESS DEVELOPMENT FOUNDATION
- Current Assignee Address: KR Gyeonsangbuk-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20210001456 2021.01.06 KR 20210001519 2021.01.06 KR 20220000830 2022.01.04
- Main IPC: C30B7/14
- IPC: C30B7/14 ; C30B29/46 ; C30B30/04 ; H01L21/02

Abstract:
Provided is a method for forming a chalcogenide thin film, the method including forming a chalcogen element-containing film on a carrier substrate, disposing the chalcogen element-containing film on a silicon wafer, wherein the surface of the silicon wafer and the surface of the chalcogen element-containing film are in contact with each other, performing heat treatment on the silicon wafer and the chalcogen element-containing film at least one time, and removing the carrier substrate. The silicon wafer has a crystal plane of (111).
Public/Granted literature
- US20220213619A1 METHOD FOR FORMING CHALCOGENIDE THIN FILM Public/Granted day:2022-07-07
Information query
IPC分类: