Invention Grant
- Patent Title: Inertial sensor, electronic apparatus, and vehicle
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Application No.: US16802137Application Date: 2020-02-26
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Publication No.: US11714101B2Publication Date: 2023-08-01
- Inventor: Teruo Takizawa
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP 19036744 2019.02.28
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01C19/5783 ; G01P15/125 ; G01P15/18 ; G01C19/5719 ; G01C21/16

Abstract:
An inertial sensor includes a substrate, a first inertial sensor element provided on the substrate, a lid bonded to the substrate so as to cover the first inertial sensor element, a first drive signal terminal that is provided outside the lid and is for a drive signal to be applied to the first inertial sensor element, and a first detection signal terminal that is provided outside the lid and is for a detection signal output from the first inertial sensor element, in which, in plan view of the substrate, the first drive signal terminal and the first detection signal terminal are provided with the lid interposed therebetween.
Public/Granted literature
- US20200278377A1 INERTIAL SENSOR, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2020-09-03
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