Invention Grant
- Patent Title: Microelectromechanical system (MEMS) scanner having a torsional beam flexure with variable width
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Application No.: US15930395Application Date: 2020-05-12
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Publication No.: US11714276B2Publication Date: 2023-08-01
- Inventor: Utku Baran , Xiao Chuan Ong , Wyatt Owen Davis
- Applicant: MICROSOFT TECHNOLOGY LICENSING, LLC
- Applicant Address: US WA Redmond
- Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
- Current Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
- Current Assignee Address: US WA Redmond
- Agency: Newport IP, LLC
- Agent Jacob P. Rohwer
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; H10N30/20

Abstract:
A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.
Public/Granted literature
- US20210356733A1 MICROELECTROMECHANICAL SYSTEM (MEMS) SCANNER HAVING A TORSIONAL BEAM FLEXURE WITH VARIABLE WIDTH Public/Granted day:2021-11-18
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