Invention Grant
- Patent Title: Imprinting apparatus, imprinting method, method for producing article, substrate, and mold
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Application No.: US17092497Application Date: 2020-11-09
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Publication No.: US11714352B2Publication Date: 2023-08-01
- Inventor: Ryo Nawata
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP 19214456 2019.11.27
- Main IPC: B29C59/00
- IPC: B29C59/00 ; G03F7/00 ; B29C59/02

Abstract:
An imprinting apparatus which is advantageous in improving the overlay accuracy in a shot located on an outer circumference of a substrate is provided. An imprinting apparatus which forms a pattern of an imprint material above a shot region of a substrate by performing alignment between each shot region of the substrate and a mold using a plurality of marks provided in each shot region of the substrate and a plurality of marks on the mold includes: a detection unit configured to detect at least a plurality of marks on the substrate in each shot region; and a control unit configured to use a first mark which is closest to a center of the substrate, a second mark which is arranged in a direction of a first axis along one side of the shot region with respect to the first mark, and a third mark which is arranged in a direction of a second axis perpendicular to the first axis with respect to the first mark for the alignment in each shot region, wherein the control unit uses, as the second mark, a mark which is arranged at a position closet to the center of the substrate in the shot region than that in a case in which the shot region is not located on the outer circumferential portion of the substrate when a shot region which is located on an outer circumferential portion of the substrate and whose center is located within the range of ±45° from the first axis is subjected to the alignment, and the control unit uses, as the third mark, a mark which is arranged at a position closer to the center of the substrate in the shot region than that in a case in which the shot region is not located on the outer circumferential portion of the substrate when a shot region which is located on the outer circumferential portion of the substrate and whose center is located within the range of ±45° from the second axis is subjected to the alignment.
Public/Granted literature
- US20210157230A1 IMPRINTING APPARATUS, IMPRINTING METHOD, METHOD FOR PRODUCING ARTICLE, SUBSTRATE, AND MOLD Public/Granted day:2021-05-27
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