Invention Grant
- Patent Title: Mask and method of manufacturing the same, evaporation apparatus and display device
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Application No.: US16429244Application Date: 2019-06-03
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Publication No.: US11714353B2Publication Date: 2023-08-01
- Inventor: Lianjie Qu
- Applicant: BEIJING BOE DISPLAY TECHNOLOGY CO., LTD. , BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing; CN Beijing
- Agency: Leason Ellis LLP
- Priority: CN 1811338966.0 2018.11.12
- Main IPC: G03F7/00
- IPC: G03F7/00 ; C23C14/04 ; G03F7/20 ; H10K71/16

Abstract:
A mask and a method of manufacturing the same, an evaporation apparatus and a display device are provided. The method includes forming a first photoresist pattern on a substrate, the first photoresist pattern including a plurality of photoresist structures, each photoresist structure including a first surface away from the substrate and a second surface near the substrate, and the size of the first surface being smaller than that of the second surface; forming a metal layer on the substrate with the first photoresist pattern, the metal layer including a plurality of recessed regions and a plurality of raised regions; forming a second photoresist pattern in the recessed regions, an orthographic projection of the second photoresist pattern on the metal layer overlapping with the recessed regions; removing regions of the metal layer not covered by the second photoresist pattern, the second photoresist pattern, the substrate and the first photoresist pattern mask.
Public/Granted literature
- US20200150530A1 MASK AND METHOD OF MANUFACTURING THE SAME, EVAPORATION APPARATUS AND DISPLAY DEVICE Public/Granted day:2020-05-14
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