There is provided a fluid sensing apparatus comprising a fluid flow channel, at least one fluid conduit in fluid communication with the fluid flow channel, and a fluid sensor having a casing and at least one sensor port in fluid communication with the at least one fluid conduit and providing access into the casing. The fluid sensing apparatus also includes a pressure compensation chamber in which the casing of the fluid sensor is enclosed. The apparatus further includes at least one pressure compensation conduit in fluid communication with the pressure compensation chamber and with the fluid flow channel. Also provided is a mass flow controller including such a fluid sensing apparatus.