- Patent Title: Information processing apparatus and information processing method
-
Application No.: US17191063Application Date: 2021-03-03
-
Publication No.: US11715194B2Publication Date: 2023-08-01
- Inventor: Youyang Ng , Bo Wang , Takuji Ohashi , Osamu Yamane , Takeshi Fujiwara
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 20149253 2020.09.04
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06F18/214

Abstract:
An information processing apparatus has an acquisitor configured to acquire an entire area image obtained by capturing an entire area of a processing surface of a wafer including at least one defect, a training image selector configured to select, as a training image, a partial image including at least one defect from the entire area image, a model constructor configured to construct a calculation model of generating a label image obtained by extracting and binarizing the defect included in the partial image, and a learner configured to update a parameter of the calculation model based on a difference between the label image generated by inputting the training image to the calculation model and a reference label image obtained by extracting and binarizing the defect of the training image.
Public/Granted literature
- US20220076398A1 INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD Public/Granted day:2022-03-10
Information query