Invention Grant
- Patent Title: Bit line and word line connection for memory array
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Application No.: US17555932Application Date: 2021-12-20
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Publication No.: US11715519B2Publication Date: 2023-08-01
- Inventor: Chang-Chih Huang , Jui-Yu Pan , Kuo-Chyuan Tzeng
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16821208 2020.03.17
- Main IPC: G11C13/00
- IPC: G11C13/00 ; H10B63/00 ; G11C11/56 ; H10N70/00

Abstract:
Various embodiments of the present application are directed towards a method for forming an integrated chip. The method includes forming a dielectric structure over a substrate. A first conductive wire is formed along the dielectric structure. The first conductive wire extends laterally along a first direction. A memory stack is formed on a top surface of the first conductive wire. A second conductive wire is formed over the memory stack. The second conductive wire extends laterally along a second direction orthogonal to the first direction. An upper conductive via is formed on the top surface of the first conductive wire. An upper surface of the upper conductive via is above the second conductive wire.
Public/Granted literature
- US20220115066A1 BIT LINE AND WORD LINE CONNECTION FOR MEMORY ARRAY Public/Granted day:2022-04-14
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