Invention Grant
- Patent Title: DC plasma control for electron enhanced material processing
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Application No.: US17942808Application Date: 2022-09-12
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Publication No.: US11715623B2Publication Date: 2023-08-01
- Inventor: William Andrew Goddard , Stewart Francis Sando , Samir John Anz , David Irwin Margolese
- Applicant: VELVETCH LLC
- Applicant Address: US CA Pasadena
- Assignee: VELVETCH LLC
- Current Assignee: VELVETCH LLC
- Current Assignee Address: US CA Pasadena
- Agency: Steinfl + Bruno LLP
- The original application number of the division: US17524330 2021.11.11
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Systems and methods for material processing using wafer scale waves of precisely controlled electrons in a DC plasma is presented. The anode and cathode of a DC plasma chamber are respectively connected to an adjustable DC voltage source and a DC current source. The anode potential is adjusted to shift a surface floating potential of a stage in a positive column of the DC plasma to a reference ground potential of the DC voltage/current sources. A conductive plate in a same region of the positive column opposite the stage is used to measure the surface floating potential of the stage. A control loop can be activated throughout various processing steps to maintain the surface floating potential of the stage to the reference ground potential. A signal generator referenced to the ground potential is capacitively coupled to the stage to control a surface potential at the stage for provision of kinetic energy to free electrons in the DC plasma.
Public/Granted literature
- US20230143453A1 DC PLASMA CONTROL FOR ELECTRON ENHANCED MATERIAL PROCESSING Public/Granted day:2023-05-11
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